Semiconductor device, and method of manufacturing semiconductor device

ABSTRACT

A semiconductor device comprises: an n-type semiconductor substrate; a p-type anode region formed in the semiconductor substrate on its front surface side; an n-type field stop region formed in the semiconductor substrate on its rear surface side with protons as a donor; and an n-type cathode region formed in the semiconductor substrate to be closer to its rear surface than the field stop region is, wherein a concentration distribution of the donor in the field stop region in its depth direction has a first peak, and a second peak that is closer to the rear surface of the semiconductor substrate than the first peak is, and has a concentration lower than that of the first peak, and a carrier lifetime in at least a partial region between the anode region and the cathode region is longer than carrier lifetimes in the anode region.

The contents of the following Japanese patent applications areincorporated herein by reference:

-   -   NO. 2014-204849 filed in JP on Oct. 3, 2014, and    -   NO. PCT/JP2015/072933 filed on Aug. 13, 2015.

BACKGROUND

1. Technical Field

The present invention relates to a semiconductor device and a method ofmanufacturing a semiconductor device.

2. Related Art

Conventionally, a vertical semiconductor device in which an anode and acathode are provided to the front surface and rear surface of asemiconductor substrate has been known. The semiconductor device is usedfor example as a FWD (free wheeling diode) (see Patent Document 1, forexample). Related prior art documents include the following documents.

Patent Document 1: Japanese Patent Application Publication No.2012-199577

Patent Document 2: WO 2013/100155

Patent Document 3: U.S. Pat. No. 6,482,681

Patent Document 4: U.S. Pat. No. 6,707,111

Patent Document 5: Japanese Patent Application Publication No.2001-160559

Patent Document 6: Japanese Patent Application Publication No.2001-156299

Patent Document 7: Japanese Patent Application Publication No. H7-193218

Patent Document 8: United States Patent Application Publication No.2008-1257

Patent Document 9: United States Patent Application Publication No.2008-54369

Preferred characteristics of the above-mentioned semiconductor deviceinclude a low reverse recovery loss (that is, a low peak current Irp ofa reverse recovery current and a low tail current of a reverse recoverycurrent) and gentle reverse recovery (that is, a gentle rate of temporalchange dV/dt of reverse recovery voltage). These characteristics areinfluenced by the carrier lifetime distribution in the directionvertical to the front surface of the semiconductor substrate. Methods ofcontrolling a carrier lifetime include a technique of irradiating theinside of a semiconductor substrate with an electron ray. But when thecarrier lifetime is controlled by electron ray irradiation, the carrierlifetime inside the semiconductor substrate becomes short uniformly. Inthis case, the tail current can be made small. But dV/dt and Irp tend tobe large.

SUMMARY General Disclosure of the Invention

A semiconductor device may comprise an n-type semiconductor substrate.The semiconductor device may comprise a p-type anode region. The anoderegion may be formed in the semiconductor substrate on its front surfaceside. The semiconductor device may comprise an n-type field stop region.The field stop region may be formed in the semiconductor substrate onits rear surface side with protons as a donor. The semiconductor devicemay comprise an n-type cathode region. The cathode region may be formedin the semiconductor substrate to be closer to its rear surface than thefield stop region is. A concentration distribution of the donor in thefield stop region in its depth direction may have a first peak, and asecond peak that is closer to the rear surface of the semiconductorsubstrate than the first peak is, and has a concentration lower thanthat of the first peak. A carrier lifetime in at least a partial regionbetween the anode region and the cathode region may be longer thancarrier lifetimes in both the anode region and the cathode region.

A carrier lifetime at a depth position at which the concentrationdistribution of the donor exhibits the first peak may be longer than thecarrier lifetimes in both the anode region and the cathode region. Theconcentration distribution of the donor in the field stop region in itsdepth direction may have a plurality of peaks, and the first peak may bea peak closest to the front surface of the semiconductor substrate amongthe plurality of peaks. The region that has a carrier lifetime longerthan that in the anode region may extend toward the front surface sideof the semiconductor substrate past a position at which theconcentration distribution of the donor exhibits the first peak.

The first peak may be at a position corresponding to an end portion of adepletion layer, on the rear surface side of the semiconductorsubstrate, that expands from a boundary between the anode region and ann-type region of the semiconductor substrate when an inter-electrodevoltage of a diode at the time of reverse recovery of the semiconductordevice becomes a half value of an applied voltage. A local lifetimekiller that shortens the carrier lifetime may be provided on the rearsurface side of the semiconductor substrate.

A region where the local lifetime killer is present is formed at aposition that does not contact a depletion layer that expands from aboundary between the anode region and an n-type region of thesemiconductor substrate when a rated reverse voltage of thesemiconductor device is applied. An injection amount of the locallifetime killer is 1/300 or more of an injection amount of the protonsthat correspond to a peak of the concentration distribution of the donorclosest to the rear surface of the semiconductor substrate. Theinjection amount of the local lifetime killer may be 1/150 or more, or1/100 or more of the injection amount of protons.

Irradiation of a lifetime killer that shortens the carrier lifetime ofthe entire semiconductor substrate may be performed. The lifetime killerused may be one that is capable of terminating, by protons, crystaldefects formed by the lifetime killer. The carrier lifetime of thecathode region may be longer than the carrier lifetime of the anoderegion.

A manufacturing method of manufacturing a semiconductor device having:an n-type semiconductor substrate; a p-type anode region formed in thesemiconductor substrate on its front surface side; an n-type field stopregion formed in the semiconductor substrate on its rear surface sidewith protons as a donor; and an n-type cathode region formed in thesemiconductor substrate to be closer to its rear surface than the fieldstop region is may comprise: injecting protons from the rear surfaceside of the semiconductor substrate such that a concentrationdistribution of the donor in the field stop region in its depthdirection has a first peak, and a second peak that is closer to the rearsurface of the semiconductor substrate than the first peak is, and has aconcentration lower than that of the first peak. The manufacturingmethod may comprise annealing the semiconductor substrate to diffuse theprotons so that a carrier lifetime in at least a partial region betweenthe anode region and the cathode region becomes longer than carrierlifetimes in both the anode region and the cathode region.

The manufacturing method may further comprise irradiating thesemiconductor substrate with a lifetime killer that shortens a carrierlifetime of the entire semiconductor substrate. The protons may bediffused in the annealing to recover the carrier lifetime in a regionwhere the protons are diffused. The manufacturing method may furthercomprise, between the injecting and the irradiating, annealing thesemiconductor substrate. A position of the first peak may be adjustedaccording to a withstand voltage class of the semiconductor device. Inthe irradiating, the semiconductor substrate may be irradiated with anelectron ray.

The summary clause does not necessarily describe all necessary featuresof the embodiments of the present invention. The present invention mayalso be a sub-combination of the features described above.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a figure illustrating the gist of a semiconductor device100 according to an embodiment of the present invention.

FIG. 2 shows a sectional schematic view of the semiconductor device 100and a figure illustrating the carrier concentration distribution in anFS region 40.

FIG. 3 shows a schematic view illustrating a distribution example of thecarrier lifetime of a semiconductor substrate 10 in its depth direction.

FIG. 4 shows a figure illustrating one exemplary leakage currentwaveform of the semiconductor device 100.

FIG. 5 shows a figure illustrating one exemplary manufacturing directionof the semiconductor device 100.

FIG. 6 shows a figure illustrating one example of an FS region formationstep S340 and a lifetime control step S350.

FIG. 7 shows a figure illustrating another example of the FS regionformation step S340 and the lifetime control step S350.

FIG. 8 shows a figure in which a leakage current waveform of asemiconductor device 100 manufactured by performing proton annealing anda leakage current waveform of a semiconductor device 100 manufacturedwithout performing proton annealing are compared with each other.

FIG. 9 shows a figure illustrating another exemplary carrier lifetimedistribution.

FIG. 10 shows a figure illustrating one exemplary end portion positionof a depletion layer when a reverse voltage is applied to thesemiconductor device 100.

FIG. 11 shows a figure illustrating one exemplary relationship betweenthe irradiation amount of helium as a local lifetime killer and forwardvoltage of the semiconductor device 100.

FIG. 12 shows a figure illustrating exemplary temporal waveforms ofanode-cathode voltage and anodic current at the time of reverserecovery.

FIG. 13 shows a figure illustrating the relationship between forwardvoltage and dV/dt when the semiconductor substrate 10 is divided intoseven regions in its depth direction, and the carrier lifetimes of therespective regions are varied.

FIG. 14A shows the relationship between the carrier lifetime (forwardvoltage) of a region from the front surface to the depth of 1/7 of thesemiconductor substrate 10, and a temporal waveform of anode-cathodevoltage V_(KA).

FIG. 14B shows the relationship between the carrier lifetime (forwardvoltage) of a region from the front surface to the depth of 1/7 of thesemiconductor substrate 10, and a temporal waveform of anode currentI_(A).

FIG. 15A shows the relationship between the carrier lifetime (forwardvoltage) of a depth region from 1/7 to 2/7 and a temporal waveform ofanode-cathode voltage V_(KA).

FIG. 15B shows the relationship between the carrier lifetime (forwardvoltage) of a depth region from 1/7 to 2/7 from the front surface of thesemiconductor substrate 10, and a temporal waveform of anode currentI_(A).

FIG. 16A shows the relationship between the carrier lifetime (forwardvoltage) of a depth region from 2/7 to 3/7 and a temporal waveform ofanode-cathode voltage V_(KA).

FIG. 16B shows the relationship between the carrier lifetime (forwardvoltage) of a depth region from 2/7 to 3/7 from the front surface of thesemiconductor substrate 10, and a temporal waveform of anode currentI_(A).

FIG. 17A shows the relationship between the carrier lifetime (forwardvoltage) of a depth region from 3/7 to 4/7 and a temporal waveform ofanode-cathode voltage V_(KA).

FIG. 17B shows the relationship between the carrier lifetime (forwardvoltage) of a depth region from 3/7 to 4/7 from the front surface of thesemiconductor substrate 10, and a temporal waveform of anode currentI_(A).

FIG. 18A shows the relationship between the carrier lifetime (forwardvoltage) of a depth region from 4/7 to 5/7 and a temporal waveform ofanode-cathode voltage V_(KA).

FIG. 18B shows the relationship between the carrier lifetime (forwardvoltage) of a depth region from 4/7 to 5/7 from the front surface of thesemiconductor substrate 10, and a temporal waveform of anode currentI_(A).

FIG. 19A shows the relationship between the carrier lifetime (forwardvoltage) of a depth region from 5/7 to 6/7 and a temporal waveform ofanode-cathode voltage V_(KA).

FIG. 19B shows the relationship between the carrier lifetime (forwardvoltage) of a depth region from 5/7 to 6/7 from the front surface of thesemiconductor substrate 10, and a temporal waveform of anode currentI_(A).

FIG. 20A shows the relationship between the carrier lifetime (forwardvoltage) of a depth region from 6/7 to the rear surface of thesemiconductor substrate 10, and a temporal waveform of anode-cathodevoltage V_(KA).

FIG. 20B shows the relationship between the carrier lifetime (forwardvoltage) of a depth region from 6/7 to the rear surface of thesemiconductor substrate 10, and a temporal waveform of anode currentI_(A).

FIG. 21 shows a figure illustrating a configuration example of asemiconductor device 200 according to another embodiment.

FIG. 22 shows a figure illustrating one exemplary method ofmanufacturing the semiconductor device 200.

FIG. 23 shows a figure illustrating another exemplary carrierconcentration distribution in the FS region 40.

FIG. 24 shows a figure illustrating one exemplary impurity concentrationdistribution of the semiconductor substrate 10 in its depth direction,together with the helium distribution and hydrogen distribution.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

Hereinafter, (some) embodiment(s) of the present invention will bedescribed. The embodiment(s) do(es) not limit the invention according tothe claims, and all the combinations of the features described in theembodiment(s) are not necessarily essential to means provided by aspectsof the invention.

FIG. 1 shows a figure illustrating the gist of a semiconductor device100 according to an embodiment of the present invention. FIG. 1 shows aschematic view of a section of the semiconductor device 100. Thesemiconductor device 100 in the present example is used as a freewheeling diode (FWD) provided to be parallel with a high withstandvoltage switch such as an IGBT, for example. The semiconductor device100 of the present example comprises an n⁻-type semiconductor substrate10, an insulation film 22, an anode electrode 24 and a cathode electrode32. Also, a p⁺-type anode region 20 is formed in the semiconductorsubstrate 10 on its front surface side, and a field stop region (FSregion 40) and an n⁺-type cathode region 30 are formed in thesemiconductor substrate 10 on its rear surface side.

The semiconductor substrate 10 is a silicon substrate, for example. Theinsulation film 22 is formed to cover the front surface of thesemiconductor substrate 10. However, the insulation film 22 has anopening through which the anode region 20 is exposed. The insulationfilm 22 is formed with an insulating material such as silicon oxide orsilicon nitride, for example.

The anode electrode 24 is formed on the anode region 20 exposed throughthe opening of the insulation film 22.

The anode electrode 24 is formed with metal such as aluminum, forexample.

The FS region 40 is an n-type region formed with protons (hydrogen ions)as the donor. The impurity concentration of the FS region (the donorconcentration in the present example) is higher than the impurityconcentration of the semiconductor substrate 10. The cathode region 30is formed in the semiconductor substrate 10 to be closer to its rearsurface than the FS region 40 is. The cathode region 30 is an n⁺-typeregion formed with phosphorus or the like as the donor, for example. Theimpurity concentration of the cathode region 30 is higher than both theimpurity concentration of the semiconductor substrate 10 and theimpurity concentration of the FS region 40. The cathode electrode 32 isformed on the rear surface of the semiconductor substrate 10, and isconnected with the cathode region 30. With such a configuration, thesemiconductor device 100 functions as a diode.

FIG. 2 shows a sectional schematic view of the semiconductor device 100and a figure illustrating the carrier concentration distribution in theFS region 40. In the sectional schematic view of the semiconductordevice 100 shown in FIG. 2, the insulation film 22, the anode electrode24 and the cathode electrode 32 are omitted. Also, in the concentrationdistribution shown in FIG. 2, the horizontal axis indicates the depthposition within the FS region 40 from its rear surface side end portion,and the vertical axis indicates the carrier concentration. The carrierconcentration corresponds to the donor concentration of protons injectedinto the FS region 40.

As shown in FIG. 2, the concentration distribution of the donor in theFS region 40 in its depth direction has a plurality of peaks. The peaksrefer to maximum values, for example. A first peak, a second peak, athird peak and a fourth peak are present in the concentrationdistribution of the donor in the FS region 40 of the present example.The first peak is present at the deepest position in the FS region 40 asseen from the rear surface side (cathode side) of the semiconductorsubstrate 10. In the present specification, locations whose distancesfrom the rear surface side (cathode side) of the semiconductor substrate10 are longer are referred to as “deeper positions”, and locations whosedistances are shorter are referred to as “shallower positions.”

The second peak is present at a position shallower than that of thefirst peak. Also, the donor concentration of the second peak is lowerthan the donor concentration of the first peak. The third peak ispresent at a position shallower than that of the second peak. In thepresent example, the donor concentration of the third peak is higherthan both the donor concentration of the second peak and the donorconcentration of the first peak. The donor concentration of the thirdpeak may be lower than at least either one of the donor concentration ofthe second peak and the donor concentration of the first peak.

The fourth peak is present at a position shallower than that of thethird peak. In the present example, the fourth peak is present at theshallowest position in the FS region 40. The fourth peak may be providedat a position adjacent to or apart from the cathode region 30. Theplurality of peaks may be provided at regular intervals or irregularintervals in the FS region 40 in its depth direction. In the presentexample, the donor concentration of the fourth peak is higher than thedonor concentrations of all the other peaks.

That is, in the present example, while the concentration of a peakdecreases as the distance, in the FS region 40, from the rear surfaceside of the semiconductor substrate 10 increases, the concentration ofthe first peak at the deepest position becomes higher than theconcentration of the second peak at the second deepest position. In thismanner, by making the concentration of the first peak higher than theconcentration of the second peak, the distribution of the carrierlifetime of the semiconductor substrate 10 in its depth direction can becontrolled appropriately.

For example, in the semiconductor substrate 10, the carrier lifetime iscontrolled by irradiation with an electron ray or the like. Irradiationwith an electron ray or the like dissociates the bonds between atoms ofsilicon crystal or the like forming the semiconductor substrate 10, andcrystal defects occur. Thereby, the carrier lifetime becomes short.Irradiation with an electron ray or the like makes the carrier lifetimeshort almost uniformly over the entire semiconductor substrate 10.

On the other hand, protons terminate atoms whose bonds have beendissociated to repair the above-mentioned crystal defects. That is,protons have a function of recovering a carrier lifetime. For thisreason, the distribution of a carrier lifetime can be controlled bycontrolling the concentration distribution of protons to be injectedinto the semiconductor substrate 10.

FIG. 3 shows a schematic view illustrating a distribution example of thecarrier lifetime of the semiconductor substrate 10 in its depthdirection. In FIG. 3, the horizontal axis indicates positions in thedepth direction of the semiconductor substrate 10, and the vertical axisindicates the carrier lifetimes. However, the distribution example showsin FIG. 3 is schematic, and the thickness of the semiconductor substrate10 and the thickness of the FS region 40 do not match those in theexample of FIG. 2. For example, in FIG. 3, the first peak of the FSregion is positioned near the center of the anode region 20 and thecathode region 30.

When protons are injected and then diffused by annealing or the like soas to attain the concentration distribution shown in FIG. 2, thediffused protons hydrogen-terminate crystal defects to recover a carrierlifetime. Because in the present example, the concentration of protonsinjected to the deepest position of the FS region 40 is high, thecarrier lifetime of an intermediate portion of the semiconductorsubstrate 10 becomes longer than those on the front surface and rearsurface of the semiconductor substrate 10 as shown in FIG. 3.

That is, the carrier lifetime in at least a partial region between theanode region 20 and the cathode region 30 is longer than the carrierlifetimes in both the anode region 20 and the cathode region 30. Theconcentration distribution of protons injected is controlled to attainsuch a distribution of carrier lifetimes. In the present example, thecarrier lifetime at a depth position that exhibits the first peak shownin FIG. 2 becomes longer than the carrier lifetimes in both the anoderegion 20 and the cathode region 30.

By attaining such a distribution of carrier lifetimes, the peak currentIrp and the tail current of a reverse recovery current can be made smallto decrease a reverse recovery loss, and the rate of temporal changedV/dt of reverse recovery voltage can be made small to realize gentlereverse recovery.

Because protons are diffused toward the front surface side of thesemiconductor substrate 10, the region that has a carrier lifetimelonger than that in the anode region 20 extends toward the front surfaceside of the semiconductor substrate 10 past a position that is at thedeepest portion in the FS region 40 and exhibits the first peak, asshown in FIG. 3. The extension amount of the region is estimated to beapproximately 30 to 40 μm from the position of the first peak asdescribed below with reference to FIG. 4. The depth position of thefirst peak is preferably determined considering the extension amount.

FIG. 4 shows a figure illustrating one exemplary leakage currentwaveform of the semiconductor device 100. In FIG. 4, the horizontal axisindicates the reverse voltage between the anode and the cathode, and thevertical axis indicates the leakage current. Also, as a comparativeexample, a leakage current waveform of a semiconductor device in whichthe FS region 40 is not formed is shown with a broken line. Thesemiconductor device 100 of the present example in which the FS region40 is formed exhibits generally decreased leakage current as comparedwith the semiconductor device in which the FS region 40 is not formed.

The semiconductor device 100 of the present example exhibits a steepinclination of leakage current increase relative to reverse voltages ofup to approximately 200 to 300 V. With a further larger reverse voltage,the inclination of current decreases. The decrease in the inclination ofcurrent is deemed to be attributable to the fact that the depletionlayer expanded by increase in voltage entered a region where the carrierlifetime was recovered by protons.

The relationship between reverse voltage V and depletion layer width Wis expressed as follows.

$W = \sqrt{\frac{2ɛ\; N_{A}}{{qN}_{D}\left( {N_{A} + N_{D}} \right)}\left( {V_{bi} - V} \right)}$

Here, Vbi is a built-in voltage, N_(A) is an accepter concentration,N_(D) is a donor concentration, e is the dielectric constant of thesemiconductor substrate 10, and q is an electric charge. Calculation ofthe depletion layer width W corresponding to a voltage at a changingpoint at which the inclination of current changes with the expressionshown above gives approximately 50 to 60 μm. The first peak ispositioned approximately 30 μm from the rear surface of thesemiconductor substrate 10. Also, the thickness of the semiconductorsubstrate 10 is approximately 110 μm. Accordingly, as explained withreference to FIG. 3, protons are estimated to be diffused byapproximately 30 μm from the position of the first peak toward the frontsurface side of the semiconductor substrate 10.

FIG. 5 shows a figure illustrating one exemplary manufacturing directionof the semiconductor device 100. First, at a substrate preparation stepS300, a semiconductor substrate 12 is prepared. The semiconductorsubstrate 12 functions as the semiconductor substrate 10 by being groundat its rear surface at a grinding step S320 described below. That is,the semiconductor substrate 12 is formed with a material which is thesame as that of the semiconductor substrate 10, and is thicker than thesemiconductor substrate 10. The substrate resistivities of thesemiconductor substrate 12 and the semiconductor substrate 10 may beapproximately 70 to 90 Ωcm.

Next, at a front surface side forming step S310, the element structureof the front surface side of the semiconductor substrate 12 is formed.In the present example, the anode region 20, the insulation film 22 andthe anode electrode 24 are formed on the front surface of thesemiconductor substrate 12. Also, after forming the element structure, aprotection film to protect the element structure may be formed. Theprotection film may be removed after manufacturing the semiconductordevice 100. Because the structure of the front surface side is formed byusing the thick semiconductor substrate 12, the possibility of a crackor the like of the semiconductor substrate 12 occurring at the frontsurface side forming step S310 can be lowered.

Next, at the grinding step S320, the rear surface side of thesemiconductor substrate 12 is ground to form the semiconductor substrate10. The thickness of the semiconductor substrate 10 after grinding isdetermined based on a rated voltage or the like of the semiconductordevice 100. The thickness of the semiconductor substrate 10 in thepresent example is approximately 100 to 130 μm.

Next, at a cathode region formation step S330, the cathode region 30 isformed on the rear surface of the semiconductor substrate 10. At S330,n-type impurities such as phosphorus are ion-injected from the rearsurface side of the semiconductor substrate 10. After ion-injecting theimpurities, laser annealing, for example, is performed on a region wherethe cathode region 30 should be formed to activate impurity ions andturn them into a donor. Thereby, the cathode region 30 is formed.

Next, at an FS region formation step S340, protons are injected into aregion where the FS region 40 should be formed. At S340, as shown inFIG. 2, protons are injected into the FS region 40 so that theconcentration distribution of protons in the FS region 40 in its depthdirection has a plurality of peaks. Among the plurality of peaks, thefirst peak closest to the front surface of the semiconductor substrate10 may be higher than the second peak closer to the rear surface of thesemiconductor substrate 10 than the first peak is. Thereby, the FSregion 40 is formed. The condition ranges of the acceleration voltageand injection amount of protons in the present example are as follows.Each value shown in the parentheses is a value to be one example.Thereby, the concentration distribution similar to that in the exampleof FIG. 2 is formed.

First peak: 1 to 4 MeV (1.5 MeV), 3E12 to 3E13 cm⁻² (1E13 cm⁻²)

Second peak: 0.8 to 3 MeV (1 Mev), 1E12 to 1E13 cm⁻² (7E12 cm⁻²)

Third peak: 0.6 to 2 MeV (0.8 MeV), 3E12 to 3E13 cm² (1E13 cm⁻²)

Fourth peak: 0.2 to 1 MeV (0.4 MeV), 3E13 to 1E15 cm⁻² (3E14 cm⁻²)

Also, the preferred ranges of respective peak concentrations of the FSregion 40 and depths from the rear surface in the present example are asfollows. Each value shown in the parentheses is a value to be oneexample. Also, because the second peak, the third peak and the fourthpeak are formed in passage regions of protons for deeper peaks, thedonor concentrations are raised due to the influence of protons in thepassage regions having been turned into the donor. For this reason, forexample, even if the injection amount of protons at the first peak, andthe injection amount of protons at the third peak are the same, thedonor concentration of the third peak is higher than that of the firstpeak. Because the donor concentrations of the passage regions of protonsof the first and second peak are added thereto.

First peak: 2E14 to 2E15 cm⁻³ (9E14 cm⁻³), 15 to 150 μm (30 μm)

Second peak: 1E14 to 1E15 cm⁻³ (5E14 cm⁻³), 10 to 100 μm (15 μm)

Third peak: 3E14 to 3E15 cm⁻³ (2E15 cm⁻³), 5 to 50 μm (10 μm)

Fourth peak: 3E14 to 3E16 cm⁻³ (5E15 cm⁻³), 1.5 to 15 μm (3 μm)

The position of the first peak may be determined according to thewithstand voltage class of the semiconductor device 100. As describedabove, protons are diffused by a certain distance toward the frontsurface side of the semiconductor substrate 10. Because the size of aregion on the front surface side of the semiconductor substrate 10desired to be left as a region where protons are not diffused isdetermined according to the withstand voltage class of the semiconductordevice 100, the position of the first peak may be determined consideringthe distance by which protons are diffused. The position of the firstpeak in a 1700-V withstand voltage semiconductor device 100, forexample, is deeper than the position of the first peak in a 1200-Vwithstand voltage semiconductor device 100. Also, in a 600-V withstandvoltage semiconductor device 100, the first peak is provided at aposition shallower than that in the 1200-V withstand voltagesemiconductor device 100.

Next, at a lifetime control step S350, the rear surface side of thesemiconductor substrate 10 is irradiated with a lifetime killer. AtS350, the rear surface side of the semiconductor substrate 10 isirradiated for example with an electron ray. Although the lifetimekiller is not limited to an electron ray, one that enables recovery, byprotons, of a carrier lifetime shortened by the lifetime killer is used.At S350, after irradiation with the lifetime killer, the semiconductorsubstrate 10 is annealed. Thereby, protons are diffused within thesemiconductor substrate 10, and the carrier lifetime of a partial regionrecovers, and the carrier lifetime distribution as shown in FIG. 3 isattained.

Next, at a cathode electrode formation step S360, the cathode electrode32 is formed in the semiconductor substrate 10 on its rear surface side.After forming the cathode electrode 32, a thermal process of the cathodeelectrode 32 may be performed. Thereby, the semiconductor device 100 canbe manufactured.

FIG. 6 shows a figure illustrating one example of the FS regionformation step S340 and the lifetime control step S350. The FS regionformation step S340 of the present example has a proton injection stepS342 and a proton annealing step S344. Also, the lifetime control stepS350 has a lifetime killer irradiation step S352 and a lifetimeannealing step S354.

At the proton injection step S342, protons are injected into a regionwhere the FS region 40 should be formed as described above. Then, at theproton annealing step S344, the semiconductor substrate 10 is annealed.By annealing the semiconductor substrate 10, protons present excessivelyin the semiconductor substrate 10 can be expelled. At the protonannealing step S344, the annealing temperature is approximately 300 to500° C., for example, and the annealing duration is approximately 0.5 to10 hours, for example.

Then, after the proton annealing step S344, irradiation with a lifetimekiller is performed (S352), and lifetime annealing is performed (S354).At the lifetime annealing step S354, the annealing temperature isapproximately 300 to 500° C., for example, and the annealing duration isapproximately 0.5 to 10 hours, for example. In the present example,irradiation with an electron ray of 80 kGy is performed. Because thepresent example comprises the proton annealing step S344 of annealingthe semiconductor substrate 10 between the proton injection step S342and the lifetime killer irradiation step S352, and excess protons areexpelled from the semiconductor substrate 10 at the proton annealingstep S344, an appropriate amount of the protons is diffused by lifetimeannealing. Thereby, the carrier lifetime in a region where protons arediffused recovers. For this reason, both decrease in the carrierlifetimes on the anode region 20 side and cathode region 30 side bylifetime killer irradiation, and recovery of the carrier lifetime in aregion between the anode region 20 and the cathode region 30 by protondiffusion can be realized.

FIG. 7 shows a figure illustrating another example of the FS regionformation step S340 and the lifetime control step S350. In the presentexample, the FS region formation step S340 does not have the protonannealing step S344. Other respects are the same as the example shown inFIG. 6.

FIG. 8 shows a figure in which a leakage current waveform of asemiconductor device 100 manufactured by performing proton annealing anda leakage current waveform of a semiconductor device 100 manufacturedwithout performing proton annealing are compared with each other. Whenlifetime annealing is performed after proton injection and lifetimekiller irradiation without performing proton annealing, a large amountof protons is remaining at the time of the lifetime annealing, andalmost all crystal defects formed by the lifetime killer irradiationrecover. For this reason, there is no effect of the lifetime killerirradiation as shown in FIG. 8. On the other hand, when annealing isperformed separately after proton injection and after lifetime killerirradiation, respectively, the remaining amount of protons at the timeof lifetime killer annealing can be controlled appropriately. For thisreason, control of the carrier lifetime distribution becomes easy.

FIG. 9 shows a figure illustrating another exemplary carrier lifetimedistribution. In the present example, the carrier lifetime in thecathode region 30 is reduced as compared with that in the distributionshown in FIG. 3. In the semiconductor device 100 of the present example,a local lifetime killer to shorten the carrier lifetime is injected intothe rear surface side of the semiconductor substrate 10. The locallifetime killer in the present example is helium. Because the tailcurrent can be made small by reducing the carrier lifetime on thecathode region 30 side as described below, a reverse recovery loss canbe decreased.

However, when the depletion layer that expands at the time when areverse voltage is applied to the semiconductor device 100 expands to aregion where the local lifetime killer is present, a leakage currentincreases significantly. For this reason, a region where the locallifetime killer is present is preferably formed at a depth position thatdoes not contact a depletion layer that expands from the boundarybetween the anode region 20 and an n-type region of the semiconductorsubstrate 10 when a rated reverse voltage of the semiconductor device100 is applied. Also, a region where the local lifetime killer ispresent may be formed at a depth position that does not contact adepletion layer that expands from the boundary between the anode region20 and an n-type region of the semiconductor substrate 10 when abreakdown voltage of the semiconductor device 100 is applied.

FIG. 10 shows a figure illustrating one exemplary end portion positionof a depletion layer when a reverse voltage is applied to thesemiconductor device 100. FIG. 10 shows the dope concentrationdistribution of impurities together. Also, in FIG. 10, distances, fromthe rear surface of the semiconductor substrate 10, of depletion layerend portions when reverse voltages are 400 V, 600 V, 800 V, 1000 V, 1100V and 1200 V are shown.

For example when a reverse voltage of 1200 V is applied, the depletionlayer expands from the front surface toward the rear surface of thesemiconductor substrate 10, and the depletion layer end reaches theposition of 4 μm from the rear surface. In the configuration of thepresent example, when the rated reverse voltage is 1200 V, the locallifetime killer is preferably neither injected nor diffused to positionsdeeper than 2.5 μm from the rear surface of the semiconductor substrate10, for example.

When the local lifetime killer is injected to shallow positions from therear surface of the semiconductor substrate 10 in this manner, the locallifetime killer injection position overlaps the fourth peak position ofthe proton injection. Crystal defects that have occurred due to heliumirradiation are influenced by defect recovery due to protons in asimilar manner to electron ray irradiation. For this reason, the locallifetime killer injection amount is preferably adjusted according to theproton injection amount in the region.

FIG. 11 shows a figure illustrating one exemplary relationship betweenthe irradiation amount of helium as a local lifetime killer and forwardvoltage of the semiconductor device 100. The forward voltage in a casewhere irradiation with helium was not performed was approximately 1.5 to1.6 V.

In the present example, the proton injection amount at the fourth peakis 3E14 cm⁻². In contrast to this, as shown in FIG. 11, with a range ofthe helium irradiation amount smaller than 1E12 cm⁻², increase in theforward voltage is not observed as compared with a case whereirradiation with helium was not performed. This is deemed to beattributable to the fact that almost all the defects due to heliumirradiation are hydrogen-terminated by protons because the heliumirradiation amount was too small as compared with the proton injectionamount. Accordingly, the local lifetime killer injection amount ispreferably 1/300 or more of the proton injection amount. The locallifetime killer injection amount may be 1/150 or more, or 1/100 or moreof the proton injection amount. Also, the local lifetime killerinjection amount is preferably ⅓ or less of the proton injection amount.

FIG. 12 shows a figure illustrating exemplary temporal waveforms ofanode-cathode voltage and anodic current at the time of reverserecovery. In the semiconductor device 100, a reverse recovery loss canbe decreased by making the peak current value Irp and the tail currentshown in FIG. 12 small. Also, by making the inclination dV/dt of theanode-cathode voltage steep, reverse recovery can be made gentle.

FIG. 13 shows a figure illustrating the relationship between forwardvoltage and dV/dt when the semiconductor substrate 10 is divided intoseven regions in its depth direction, and the carrier lifetimes of therespective regions are varied. In the example shown in FIG. 13, therelationship is calculated by device simulation. Generally, the shorterthe carrier lifetime, the higher the forward voltage Vf.

FIG. 14A shows the relationship between forward voltage Vf at the timewhen the carrier lifetime of a region from the front surface to thedepth of 1/7 of the semiconductor substrate 10 is varied, and a temporalwaveform of anode-cathode voltage V_(KA). FIG. 14B shows therelationship between forward voltage Vf at the time when the carrierlifetime of a region from the front surface to the depth of 1/7 of thesemiconductor substrate 10 is varied, and a temporal waveform of anodecurrent I_(A). FIG. 14A to FIG. 20B show examples in the cases ofVf=1.66 V, 1.70 V, 1.80 V, 1.90 V and 2.00 V. Respective figures showgraphs in the cases of Vf=1.66 V and 2.00 V with arrows, and graphs inthe cases of Vf=1.70 V, 1.80 V and 1.90 V are arranged in the descendingorder of the magnitude of Vf between the graphs in the cases of Vf=1.66V and 2.00 V.

FIG. 15A shows the relationship between forward voltage Vf at the timewhen the carrier lifetime of a depth region from 1/7 to 2/7 is varied,and a temporal waveform of anode-cathode voltage V_(KA). FIG. 15B showsthe relationship between forward voltage Vf at the time when the carrierlifetime of a depth region from 1/7 to 2/7 from the front surface of thesemiconductor substrate 10 is varied, and a temporal waveform of anodecurrent I_(A).

FIG. 16A shows the relationship between forward voltage Vf at the timewhen the carrier lifetime of a depth region from 2/7 to 3/7 is varied,and a temporal waveform of anode-cathode voltage V_(KA). FIG. 16B showsthe relationship between forward voltage Vf at the time when the carrierlifetime of a depth region from 2/7 to 3/7 from the front surface of thesemiconductor substrate 10 is varied, and a temporal waveform of anodecurrent I_(A).

FIG. 17A shows the relationship between forward voltage Vf at the timewhen the carrier lifetime of a depth region from 3/7 to 4/7 is varied,and a temporal waveform of anode-cathode voltage V_(KA). FIG. 17B showsthe relationship between forward voltage Vf at the time when the carrierlifetime of a depth region from 3/7 to 4/7 from the front surface of thesemiconductor substrate 10 is varied, and a temporal waveform of anodecurrent I_(A).

FIG. 18A shows the relationship between forward voltage Vf at the timewhen the carrier lifetime of a depth region from 4/7 to 5/7 is varied,and a temporal waveform of anode-cathode voltage V_(KA). FIG. 18B showsthe relationship between forward voltage Vf at the time when the carrierlifetime of a depth region from 4/7 to 5/7 from the front surface of thesemiconductor substrate 10 is varied, and a temporal waveform of anodecurrent I_(A).

FIG. 19A shows the relationship between forward voltage Vf at the timewhen the carrier lifetime of a depth region from 5/7 to 6/7 is varied,and a temporal waveform of anode-cathode voltage V_(KA). FIG. 19B showsthe relationship between forward voltage Vf at the time when the carrierlifetime of a depth region from 5/7 to 6/7 from the front surface of thesemiconductor substrate 10 is varied, and a temporal waveform of anodecurrent I_(A).

FIG. 20A shows the relationship between forward voltage Vf at the timewhen the carrier lifetime of a depth region from 6/7 to the rear surfaceof the semiconductor substrate 10 is varied, and a temporal waveform ofanode-cathode voltage V_(KA). FIG. 20B shows the relationship betweenforward voltage Vf at the time when the carrier lifetime of a depthregion from 6/7 to the rear surface of the semiconductor substrate 10 isvaried, and a temporal waveform of anode current I_(A).

The following knowledge can be gained from FIG. 13 to FIG. 20A.

In the region from the front surface (the anode side front surface) to3/7 of the semiconductor substrate 10, fluctuation of the forwardvoltage Vf has large influence on Irp. On the other hand, even when theforward voltage Vf increases, dV/dt tends to decrease. For this reason,in this region, the carrier lifetime is preferably short so as to reduceIrp.

In the region from 3/7 to 5/7 from the front surface of thesemiconductor substrate 10, fluctuation of the forward voltage Vf haslarge influence on dV/dt. For this reason, the carrier lifetime of thisregion is preferably long so as to realize gentle dV/dt.

In the region from 5/7, from the front surface of the semiconductorsubstrate 10, to the rear surface (the cathode side front surface) ofthe semiconductor substrate 10, fluctuation of the forward voltage Vfhas large influence on a tail current. For this reason, the carrierlifetime is favorably short in order to make the tail current small. Onthe other hand, if the carrier lifetime is too short, carriers on thecathode side decrease so much that an oscillation phenomenon of voltageand current may occur at the time of reverse recovery. For this reason,the carrier lifetime of this region may be shorter than that in theregion from 3/7 to 5/7, and longer than that in the region from thefront surface of the semiconductor substrate 10 to 3/7.

The above-mentioned phenomenon can be understood also as follows. At thetime of reverse recovery, the depletion layer expands from the anoderegion 20 side. Carriers that have been present in the region of thedepletion layer are expelled to become a reverse recovery current.Accordingly, if there is a lot of carriers on the front surface side ofthe semiconductor substrate 10, it becomes more likely that the peak Irpof current to flow first becomes higher.

Also, carriers present in the region between the depletion layer and therear surface of the semiconductor substrate 10 in a state whereexpansion of the depletion layer is stopped flows as a tail current. Forthis reason, if there is a lot of carriers on the rear surface side ofthe semiconductor substrate 10, it becomes more likely that a tailcurrent becomes larger.

Also, when the semiconductor device 100 is used as a free wheeling diodesuch as an IGBT, the IGBT or the like draws a predetermined current fromthe semiconductor device 100. At this time, if a lot of carriers ispresent in the semiconductor substrate 10, the current can be suppliedto the IGBT or the like even if the depletion layer expands slowly. Onthe other hand, when the number of carriers is small, the depletionlayer expands fast in order to supply the current, and the inclinationdV/dt of the reverse recovery voltage becomes steep. For this reason,when the number of carriers in a region in the middle of thesemiconductor substrate 10 through which the depletion layer expands islarge, the inclination of dV/dt of reverse recovery voltage becomes lesssteep.

Also, the first peak is preferably provided at a position correspondingto an end portion of the above-mentioned depletion layer on the rearsurface side of the semiconductor substrate 10 when the inter-electrodevoltage of the diode at the time of reverse recovery of thesemiconductor device 100 becomes the half value of an applied voltage.Generally, an applied voltage at the time of reverse recovery is oftenset to be approximately the half of the withstand voltage of an element.For example, a 1200-V withstand voltage element is reverse-recovered atan applied voltage of 600 V. The moment when dV/dt becomes the largestat the time of reverse recovery is when the anode-cathode voltagebecomes the half of an applied voltage. By locating the first peak at aposition where the depletion layer is expanding at the time of theanode-cathode voltage, dV/dt can be made small efficiently.

In the semiconductor device 100 of the present example, the carrierlifetime is caused to recover by injecting protons to form the FS region40, and at the same time diffusing the protons. Because in the presentexample, the distribution of protons is like the one shown in FIG. 2 orthe like, as shown in FIG. 3 or FIG. 9, the distribution of the carrierlifetime having a peak in the middle of the semiconductor substrate 10can be formed. Thanks to the distribution of the carrier lifetime, asexplained with reference to FIG. 13 to FIG. 20A, the small peak currentIrp, the small tail current and the gentle inclination dV/dt of reverserecovery voltage can be realized.

FIG. 21 shows a figure illustrating a configuration example of asemiconductor device 200 according to another embodiment. Thesemiconductor device 200 of the present example is an RC-IGBT device inwhich an IGBT element 140 and a FWD element 150 connected inanti-parallel are formed integrally. The semiconductor device 200comprises the semiconductor substrate 10, an insulation film 122, anemitter anode electrode 124 and a collector cathode electrode 132.

The semiconductor substrate 10 has p-type regions 120 formed on itsfront surface side. Also, the semiconductor substrate 10 has a pluralityof trenches 104 formed to penetrate the p-type regions 120 from thefront surface of the semiconductor substrate 10. The leading end of eachtrench 104 on the rear surface side of the semiconductor substrate 10protrudes past the end portions of the p-type regions 120. Each trench104 has a trench gate 102 formed to penetrate the p-type region 120 fromthe front surface of the semiconductor substrate 10. Also, each trenchgate 102 and each semiconductor layer are insulated by an insulationfilm 103.

Also, among the plurality of p-type regions 120 separated by thetrenches 104, in some of the p-type regions 120 corresponding to theIGBT element 140, n⁺-type regions 106 and p⁺-type region 108 are formed.The n⁺-type regions 106 are provided adjacent to the trenches 104 on thefront surface of the p-type regions 120. The p⁺-type regions 108 areprovided being sandwiched by the n⁺-type regions 106 on the frontsurface of the p-type regions 120.

Also, among the plurality of p-type regions 120, p-type regions 120corresponding to the FWD element 150 function as the anode region 20explained with reference to FIG. 1 to FIG. 20B. The n⁺-type regions 106and the p⁺-type regions 108 may be formed also in the p-type regions 120corresponding to the FWD element 150.

The emitter anode electrode 124 is connected to the respective p-typeregions 120. When the n⁺-type regions 106 and the p⁺-type regions 108are formed in the p-type regions 120, the emitter anode electrode 124 isconnected to both the n⁺-type regions 106 and the p⁺-type regions 108.When the n⁺-type regions 106 and the p⁺-type regions 108 are not formed,the emitter anode electrode 124 is connected to the p-type regions 120.

Also, the emitter anode electrode 124 and the trench gates 102 areinsulated by the insulation film 122. The respective trench gates 102are connected to a gate electrode not shown in the figure. Due to avoltage being applied to the trench gates 102, a channel in the verticaldirection is formed in the p-type regions 120 between the n⁺-typeregions 106 and the semiconductor substrate 10.

The semiconductor substrate 10 comprises the FS region 40 formed on itsrear surface side. The FS region 40 has the structure andcharacteristics which are the same as those of the FS region 40explained with reference to FIG. 1 to FIG. 20B. Also, among regions onthe rear surface of the FS region 40, in a region corresponding to theIGBT element 140, a p-type collector region 130 is formed, and in aregion corresponding to the FWD element 150, the n-type cathode region30 is formed. On the rear surfaces of the collector region 130 and thecathode region 30, the common collector cathode electrode 132 is formed.

It is effective, also in the RC-IGBT semiconductor device 200 of thepresent example, to control the carrier lifetime by adjusting the protoninjection concentration in the FS region 40 as explained with referenceto FIG. 1 to FIG. 20B.

FIG. 22 shows a figure illustrating one exemplary method ofmanufacturing the semiconductor device 200. First, the semiconductorsubstrate 12 is prepared in a manner similar to that in the example ofFIG. 5. Next, at a front surface element structure formation step S402,the element structure of the semiconductor substrate 12 on the frontsurface side thereof is formed. In the present example, the p-typeregions 120, the trenches 104, the n⁺-type regions 106, the p⁺-typeregions 108, the n-type regions 110 and the insulation film 122 areformed on the front surface of the semiconductor substrate 12.

Next, at a front surface electrode formation step S404, the emitteranode electrode 124 is formed. Next, at a rear surface grinding stepS406, the rear surface of the semiconductor substrate 12 is ground.Next, at a rear surface diffusion layer ion injection step S408, p-typeimpurity ions and n-type impurity ions are injected, respectively, intoregions of the rear surface of the semiconductor substrate 10corresponding to the collector region 130 and the cathode region 30.Next, at a rear surface laser annealing step S410, the regions to whichthe p-type impurity ions and the n-type impurity ions are injected arelaser-annealed to form the collector region 130 and the cathode region30. Next, at a front surface protection film formation step S411, aprotection film is formed on the front surface of the semiconductorsubstrate 10.

Next, at a proton injection step S412 and a proton annealing step S414,the FS region 40 is formed. The proton injection step S412 and theproton annealing step S414 are the same as the proton injection stepS342 and the proton annealing step S344 in FIG. 6. Thereby, the FSregion 40 having the concentration distribution of protons as the oneshown in FIG. 2 is formed.

Next, at a lifetime killer irradiation step S416 and a lifetimeannealing step S418, the carrier lifetime is controlled. The lifetimekiller irradiation step S416 and the lifetime annealing step S418 arethe same as the lifetime killer irradiation step S352 and the lifetimeannealing step S354 in FIG. 6. Thereby, the carrier lifetimedistribution as the one shown in FIG. 3 or FIG. 9 is realized.

Then, at a rear surface electrode formation step S420, the collectorcathode electrode 132 is formed. Thereby, the semiconductor device 200is manufactured.

While the embodiments of the present invention have been described, thetechnical scope of the invention is not limited to the above describedembodiments. It is apparent to persons skilled in the art that variousalterations and improvements can be added to the above-describedembodiments. It is also apparent from the scope of the claims that theembodiments added with such alterations or improvements can be includedin the technical scope of the invention.

FIG. 23 shows a figure illustrating another exemplary carrierconcentration distribution in the FS region 40. In FIG. 23, thehorizontal axis indicates the depth position within the FS region 40from its rear surface side end portion, and the vertical axis indicatesthe carrier concentration. The carrier concentration corresponds to thedonor concentration of protons injected into the FS region 40.

As shown in FIG. 23, the concentration distribution of the donor in theFS region 40 in its depth direction has a plurality of peaks. In thepresent example also, similarly to the example of FIG. 2, there are afirst peak, a second peak, a third peak and a fourth peak. However, inthe present example, the first to third peaks excluding the fourth peakclosest to the rear surface side end portion of the FS region 40 havehigher carrier concentrations as the distances from the rear surface endportion increase. That is, the carrier concentration of the first peakis higher than the carrier concentrations of the second peak and thethird peak, and the carrier concentration of the second peak is higherthan the carrier concentration of the third peak.

The FS region 40 prevents the depletion layer expanding from theboundary of the p⁺-type anode region 20 and the n⁻-type semiconductorsubstrate 10 from reaching the cathode region 30. The depletion layermay expand, at most, to the peak closest to the rear surface end portionamong the plurality of peaks.

In the present example, the concentrations of the first to third peakdecrease gradually from the substrate front surface side toward the rearsurface side. Also, the lowest peak concentration is higher than that inthe example of FIG. 2. For this reason, the inclination dV/dt of reverserecovery voltage can be made small.

FIG. 24 shows a figure illustrating one exemplary impurity concentrationdistribution of the semiconductor substrate 10 in its depth direction,together with the helium distribution and hydrogen distribution. In FIG.24, the p-type and n-type impurity concentrations are shown together. Inthe present example, the p-type anode region 20 with a highconcentration is formed from the front surface of the semiconductorsubstrate 10 to the depth of approximately several μm. An n⁻-type regionas a drift region is formed from an end portion of the anode region 20to the depth of approximately 55 μm, and the FS region 40 and thecathode region 30 are formed to the depths of approximately 55 μm andmore.

Also, in FIG. 24, the impurity concentration of a comparative example300 is indicated with a dotted line. In the FS region 40 of thesemiconductor device 100 of the present example, the peak of impurityconcentration closest to the front surface of the semiconductorsubstrate 10 is higher than the corresponding peak in the comparativeexample 300.

Also, in the semiconductor device 100 of the present example, the frontsurface of the semiconductor substrate 10 is irradiated with helium ionsin order to control the carrier lifetime on the front surface side ofthe semiconductor substrate 10. In the present example, the averagerange of helium ions is Rp, and the half-value width of the rangedistribution of helium ions is ΔRp.

The peak position of a range of helium ions with which the front surfaceof the semiconductor substrate 10 is irradiated (that is, the positionof a depth Rp from the front surface of the semiconductor substrate 10)may be located within a range of 40 μm from the peak closest to thefront surface of the semiconductor substrate 10 from among the peaks inthe concentration distribution of the donor in the FS region 40. Thedistance from a peak may be measured from a position at which a donorconcentration becomes a half of a maximum value of the peak on thesubstrate front surface side from the maximum point of the peak.

With such a configuration, a dangling bond attributable to holesgenerated due to irradiation with helium ions is terminated by apredetermined amount by hydrogen diffused from the peak of the FS region40. For this reason, a leakage current attributable to helium and holescan be decreased. Also, the carrier lifetime distribution shown in FIG.3 can be readily realized.

The half-value position Rp-ΔRp of the range distribution of helium ionsmay be within the range of 40 μm from the peak of the concentrationdistribution of the donor in the FS region 40. Thereby, a leakagecurrent can be decreased more efficiently. However, the distributionposition of helium ions is not limited to these ranges. Even if the peakposition Rp of the range of helium ions is apart from the peak of theconcentration distribution of the donor in the FS region 40 by 40 μm ormore, a leakage current can be decreased to a certain degree, althoughhydrogen diffused from the peak becomes less.

The operations, procedures, steps, and stages of each process performedby an apparatus, system, program, and method shown in the claims,embodiments, or diagrams can be performed in any order as long as theorder is not indicated by “prior to,” “before,” or the like and as longas the output from a previous process is not used in a later process.Even if the process flow is described using phrases such as “first” or“next” in the claims, embodiments, or diagrams, it does not necessarilymean that the process must be performed in this order.

EXPLANATION OF REFERENCE SYMBOLS

10: semiconductor substrate, 12: semiconductor substrate, 20: anoderegion, 22: insulation film, 24: anode electrode, 30: cathode region,32: cathode electrode, 40: FS region, 100: semiconductor device, 102:trench gate, 103: insulation film, 104: trench, 106: n⁺-type region,108: p⁺-type region, 110: n-type region, 120: p-type region, 122:insulation film, 124: emitter anode electrode, 130: collector region,132: collector cathode electrode, 140: IGBT element, 150: FWD element,200: semiconductor device, 300: comparative example

What is claimed is:
 1. A semiconductor device comprising: an n-typesemiconductor substrate; a p-type anode region formed in thesemiconductor substrate on its front surface side; an n-type field stopregion formed in the semiconductor substrate on its rear surface sidewith protons as a donor; and an n-type cathode region formed in thesemiconductor substrate to be closer to its rear surface than the fieldstop region is, wherein a concentration distribution of the donor in thefield stop region in its depth direction has a first peak, and a secondpeak that is closer to the rear surface of the semiconductor substratethan the first peak is, and has a concentration lower than that of thefirst peak, and a carrier lifetime in at least a partial region betweenthe anode region and the cathode region is longer than a carrierlifetime in the anode region.
 2. The semiconductor device according toclaim 1, wherein a carrier lifetime at a depth position at which theconcentration distribution of the donor exhibits the first peak islonger than the carrier lifetime in the anode region.
 3. Thesemiconductor device according to claim 2, wherein the concentrationdistribution of the donor in the field stop region in its depthdirection has a plurality of peaks, and the first peak is a peak closestto the front surface of the semiconductor substrate among the pluralityof peaks.
 4. The semiconductor device according to claim 3, wherein theregion that has a carrier lifetime longer than that in the anode regionextends toward the front surface side of the semiconductor substratepast a position at which the concentration distribution of the donorexhibits the first peak.
 5. The semiconductor device according to claim3, wherein the first peak is at a position corresponding to an endportion of a depletion layer, on the rear surface side of thesemiconductor substrate, that expands from a boundary between the anoderegion and an n-type region of the semiconductor substrate when aninter-electrode voltage of an anode and a cathode at the time of reverserecovery of the semiconductor device becomes a half value of an appliedvoltage at the time of reverse recovery.
 6. The semiconductor deviceaccording to claim 1, wherein a local lifetime killer that shortens thecarrier lifetime is provided on the rear surface side of thesemiconductor substrate.
 7. The semiconductor device according to claim6, wherein a region where the local lifetime killer is present is formedat a position that does not contact a depletion layer that expands froma boundary between the anode region and an n-type region of thesemiconductor substrate when a rated reverse voltage of thesemiconductor device is applied.
 8. The semiconductor device accordingto claim 6, wherein an injection amount of the local lifetime killer is1/300 or more of an injection amount of the protons that correspond to apeak of the concentration distribution of the donor closest to the rearsurface of the semiconductor substrate.
 9. A manufacturing method ofmanufacturing a semiconductor device having: an n-type semiconductorsubstrate; a p-type anode region formed in the semiconductor substrateon its front surface side; an n-type field stop region formed in thesemiconductor substrate on its rear surface side with protons as adonor; and an n-type cathode region formed in the semiconductorsubstrate to be closer to its rear surface than the field stop regionis, the method comprising: injecting protons from the rear surface sideof the semiconductor substrate such that a concentration distribution ofthe donor in the field stop region in its depth direction has a firstpeak, and a second peak that is closer to the rear surface of thesemiconductor substrate than the first peak is, and has a concentrationlower than that of the first peak; and annealing the semiconductorsubstrate to diffuse the protons so that a carrier lifetime in at leasta partial region between the anode region and the cathode region becomeslonger than a carrier lifetime in the anode region.
 10. Themanufacturing method according to claim 9, further comprisingirradiating the semiconductor substrate with a lifetime killer thatshortens a carrier lifetime of the entire semiconductor substrate,wherein the protons are diffused in the annealing to recover the carrierlifetime in a region where the protons are diffused.
 11. Themanufacturing method according to claim 10, further comprising, betweenthe injecting and the irradiating, annealing the semiconductorsubstrate.
 12. The manufacturing method according to claim 9, wherein aposition of the first peak is adjusted according to a withstand voltageclass of the semiconductor device.
 13. The manufacturing methodaccording to claim 10, wherein in the irradiating, the semiconductorsubstrate is irradiated with an electron ray.
 14. The manufacturingmethod according to claim 9, wherein in the annealing, the carrierlifetime in at least a partial region between the anode region and thecathode region is made longer than a carrier lifetime in the cathoderegion.
 15. The manufacturing method according to claim 9, furthercomprising irradiating the rear surface side of the semiconductorsubstrate with a local lifetime killer that shortens the carrierlifetime.
 16. The manufacturing method according to claim 9, wherein inthe annealing, the region that has a carrier lifetime longer than thatin the anode region is caused to extend toward the front surface side ofthe semiconductor substrate past a position at which the concentrationdistribution of the donor exhibits the first peak.
 17. The manufacturingmethod according to claim 9, further comprising irradiating, with alocal lifetime killer that shortens the carrier lifetime, the regionthat: extends toward the front surface side of the semiconductorsubstrate past a position at which the concentration distribution of thedonor exhibits the first peak; and has a carrier lifetime longer thanthat of the anode region.
 18. The semiconductor device according toclaim 1, wherein the carrier lifetime in at least a partial regionbetween the anode region and the cathode region is longer than a carrierlifetime in the cathode region.
 19. The semiconductor device accordingto claim 18, wherein a carrier lifetime at a depth position at which theconcentration distribution of the donor exhibits the first peak islonger than the carrier lifetime in the cathode region.
 20. Thesemiconductor device according to claim 4, wherein the region that has acarrier lifetime longer than that of the anode region extends toward thefront surface side of the semiconductor substrate past, by 30 to 40 μm,a position at which the concentration distribution of the donor exhibitsthe first peak.
 21. The semiconductor device according to claim 4,wherein a local lifetime killer that shortens the carrier lifetime isprovided in the region that: extends toward the front surface side ofthe semiconductor substrate past a position at which the concentrationdistribution of the donor exhibits the first peak; and has a carrierlifetime longer than that of the anode region.